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基于Petri网的组合设备建模与调度综述

袁凤连 黄波 王际鹏 潘春荣

袁凤连, 黄波, 王际鹏, 潘春荣. 基于Petri网的组合设备建模与调度综述. 自动化学报, 2022, 45(x): 1−20 doi: 10.16383/j.aas.c210951
引用本文: 袁凤连, 黄波, 王际鹏, 潘春荣. 基于Petri网的组合设备建模与调度综述. 自动化学报, 2022, 45(x): 1−20 doi: 10.16383/j.aas.c210951
Yuan Feng-Lian, Huang Bo, Wang Ji-Peng, Pan Chun-Rong. A survey of modeling and scheduling of cluster tools based on petri nets. Acta Automatica Sinica, 2022, 45(x): 1−20 doi: 10.16383/j.aas.c210951
Citation: Yuan Feng-Lian, Huang Bo, Wang Ji-Peng, Pan Chun-Rong. A survey of modeling and scheduling of cluster tools based on petri nets. Acta Automatica Sinica, 2022, 45(x): 1−20 doi: 10.16383/j.aas.c210951

基于Petri网的组合设备建模与调度综述

doi: 10.16383/j.aas.c210951
基金项目: 国家自然科学基金(61773206, 72161019)资助
详细信息
    作者简介:

    袁凤连:南京理工大学计算机科学与工程学院博士研究生. 主要研究方向为离散事件系统, Petri网和晶圆制造系统. E-mail: yuanfenglian@njust.edu.cn

    黄波:南京理工大学计算机科学与工程学院教授. 主要研究方向为离散事件系统, Petri网, 智能制造和机器人系统. 本文通信作者. E-mail: huangbo@njust.edu.cn

    王际鹏:湖北工业大学机械工程学院讲师. 主要研究方向为晶圆制造系统, 智能制造, 离散事件系统和Petri网. E-mail: wangjipeng.tpk@gmail.com

    潘春荣:江西理工大学机电工程学院教授. 主要研究方向为制造系统的建模, 仿真, 调度与控制. E-mail: mailto:crpan@jxust.edu.cn

A Survey of Modeling and Scheduling of Cluster Tools Based on Petri Nets

Funds: Supported by National Natural Science Foundation of China (61773206, 72161019)
More Information
    Author Bio:

    YUAN Feng-Lian Ph.D. candidate at the School of Computer Science and Engineering, Nanjing University of Science and Technology. Her research interest covers discrete event systems, Petri nets, and wafer fabrication system

    HUANG Bo Professor at the School of Computer Science and Engineering, Nanjing University of Science and Technology. His research interest covers discrete event systems, Petri nets, intelligent manufacturing, and robotic systems. Corresponding author of this paper

    WANG Ji-Peng Lecturer at the School of mechanical engineering, Hubei University of Technology. His research interest covers wafer fabrication system, intelligent manufacturing, discrete event systems, and Petri nets

    PAN Chun-Rong Professor at the School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology. His research interest covers modeling, simulation, scheduling, and control of manufacturing systems

  • 摘要: 组合设备是半导体晶圆制造的核心装备, 其调度与控制优化是半导体制造领域极具挑战性的课题. Petri网因其强大的建模能力和简约的图形化表达优势, 被广泛地应用于组合设备的建模与调度. 对基于Petri网的组合设备建模与调度方法进行综述, 归纳总结了组合设备的结构类型、晶圆流程模式、调度策略及Petri网建模方法, 并系统阐述组合设备的七类典型调度问题, 包括驻留时间约束、作业时间波动、晶圆重入加工、多品种晶圆加工、加工模块故障、加工模块清洗和组合设备群. 最后讨论了当前组合设备调度存在的挑战及后续可能的研究方向.
  • 图  1  组合设备示意图

    Fig.  1  Sketch of cluster tools

    图  2  线型混合组合设备群

    Fig.  2  Linear hybrid multi-cluster tools

    图  3  树型单臂组合设备群

    Fig.  3  Tree-like multi-cluster tools

    图  4  组合设备不同晶圆流模式

    Fig.  4  Different wafer flow pattern for cluster tools

    图  5  晶圆流为(1,1,1,1)的拉式策略

    Fig.  5  Backward strategy for wafer flow pattern (1,1,1,1)

    图  6  晶圆流为(1,1,1,1)的交换策略

    Fig.  6  Swap strategy for wafer flow pattern (1,1,1,1)

    图  7  不同晶圆流的POPN模型

    Fig.  7  POPN models for different wafer flow pattern

    图  8  混合2-组合设备的POPN模型

    Fig.  8  The POPN model for a hybrid 2-cluster tools

    图  9  单臂组合设备的ROPN模型

    Fig.  9  The ROPN model for a single-arm cluster tool

    图  10  双臂组合设备的ROPN模型

    Fig.  10  The ROPN model for a dual-arm cluster tool

    图  11  邻接组合设备ROPN模型

    Fig.  11  The ROPN model of adjacent cluster tools

    表  1  拉式与交换策略在组合设备的应用

    Table  1  Backward and swap strategy in cluster tools

    调度问题 拉式\ 改进拉式 交换\ 改进交换
    驻留时间约束 文献[16, 1921, 25, 3435] 文献[1112, 17]
    作业时间波动 文献[30, 3436] 文献[2933]
    晶圆重入加工 文献[14, 36, 3840, 47] 文献[4146, 4850]
    多品种晶圆 文献[53, 56, 59, 6263, 66, 72] 文献[5457, 6263]
    PM故障 文献[7677] 文献[7879]
    PM清洗 文献[6970, 7273] 文献[68, 7071]
    下载: 导出CSV

    表  2  组合设备的典型问题及调度方法

    Table  2  Typical problems and scheduling methods of cluster tools

    调度问题 相关文献 系统特征 Petri网类型 调度方法 调度目标
    驻留时间约束 [11] POPN 变迁发射顺序 最小周期时间
    [12] POPN 变迁发射顺序 可调度性分析
    [13] 单与双 POPN TM无干涉序列 最小周期时间
    [14] 单与双 POPN 变迁发射顺序 最小周期时间
    [15] POPN 混合整数规划 优化最坏情况下$k$-晶圆周期
    [1617] 单或双, 加工主导 ROPN TM等待时间 最优$1$-晶圆周期
    [1921] 单, 暂态过程, 加工主导ROPN TM等待时间 优化暂态过程
    [18, 25] 单, 传输与加工主导 ROPN TM等待时间 最小周期时间
    作业时间波动 [26] 单或双, 驻留时间约束 POPN 延迟TM发射时间 稳态运行
    [27] POPN 延迟TM发射时间恢复到稳态
    [28] 单与双, 驻留时间约束 POPN 反馈控制法 最小周期时间
    [29] 双, 驻留时间约束 POPN TM变迁发射顺序 可调度的充分必要条件
    [30] 单与双, 驻留时间约束 POPN 自适应调度 最小周期时间
    [3136] 单或双, 驻留时间约束ROPN 实时调度 最小周期时间
    晶圆重入加工 [38] POPN P不变量分析 稳态的性能分析
    [39] 单, 不同晶圆流 POPN 变迁发射顺序 最小周期时间
    [4044] 单或双 ROPN TM等待时间 最小周期时间
    [4548] 单或双, 驻留时间约束 ROPN TM等待时间 最小周期时间
    [4950] 单或双, 驻留时间约束和作业时间波动 ROPN 实时调度 最小周期时间
    多品种晶圆 [56] 单与双, 混流, PM共享 POPN 启发式调度 最小周期时间
    [57] 双, 混流, PM共享 POPN 变迁发射顺序 最小周期时间
    [58] 双, 混流, 并行, 驻留时间约束 POPN 变迁发射顺序 晶圆延迟最少
    [59] 单, 混流, 驻留时间约束 ROPN 虚拟加工 可调度性
    [53] 单, 混流 POPN 自循环控制法 系统无死锁运行
    [62] 单, 双, 切换, 驻留时间约束 POPN 混合整数规划 最少完成时间
    [63] 单, 双, 切换 POPN 混合整数规划 最小完成时间
    PM清洗 [68] 双, $m\geq 1$ POPN 启发式调度 最小周期时间
    [6970] 单或双, $m=1$ POPN 部分加载 最小周期时间
    [71] 双, $m=1$ POPN 部分加载 最小晶圆延迟
    [72] 单, $m=1$, 驻留时间约束 ROPN 线性规划 最小周期时间
    [73] 单, $m=1$, 驻留时间约束, 暂态 ROPN 线性规划 优化暂态过程
    PM故障 [7677] 单, 驻留时间约束 ROPN 故障响应策略 可行调度
    [79] 双, 重入, 驻留时间约束 ROPN 虚拟晶圆 优化暂态过程
    下载: 导出CSV

    表  3  不同组合设备群及调度方法

    Table  3  Different multi-cluster tools and scheduling methods

    相关文献 拓扑结构 系统特征 缓冲模块容量 瓶颈状态 调度策略 模型方法 调度目标
    [80, 82] 线型 1或2 加工主导 拉式 ROPN 最优$1$-晶圆周期
    [81] 线型 1 传输主导 拉式 ROPN 最优$1$-晶圆周期
    [83] 线型 1或2 加工主导 拉式 ROPN 最优缓冲模块配置
    [84] 线型 混合 1 加工主导 拉式与交换 ROPN 最优$1$-晶圆周期
    [85] 树型 1 加工主导 拉式 ROPN 最优$1$-晶圆周期
    [8687] 树型 混合 1 加工主导 拉式与交换 ROPN 最优$1$-晶圆周期
    [88] 线型 单、双 1 无固定 无固定 POPN 最优$k$-晶圆周期
    [89] 线型 混合 1或2 无固定 拉式与交换 分解法 最优$k$-晶圆周期
    [91] 树型 1或2 无固定 拉式 递归与分解法 最小周期
    [92] 线型 单, 驻留时间约束 2 加工主导 拉式 ROPN 最优$1$-晶圆周期
    [93] 线型 混合, 驻留时间约束 1 加工主导 拉式与交换 ROPN 最优$1$-晶圆周期
    [94] 线型 单, 驻留时间约束 2 无固定 无固定 启发式 最小化最大完工时间
    [95] 线型 单、双, 驻留时间约束, 暂态 1 加工主导 拉式或交换 线性规划 最优$1$-晶圆周期
    [96] 线型 双, 驻留时间约束, 作业时间波动 1 加工主导 交换 实时调度 最优$1$-晶圆周期
    [97] 线型 单、双, 驻留时间约束 2 无固定 无固定 改进动态规划最优Pareto
    [98] 线型 单、双、混合, 驻留时间约束 2 无固定 无固定 POPN 最优$1$-晶圆周期
    下载: 导出CSV
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  • 收稿日期:  2021-10-09
  • 录用日期:  2022-06-07
  • 网络出版日期:  2022-07-22

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