基于相位控制的硅微机械陀螺驱动控制技术

罗兵; 王安成; 吴美平

doi:10.3724/SP.J.1004.2012.00206

基于相位控制的硅微机械陀螺驱动控制技术

doi: 10.3724/SP.J.1004.2012.00206

1.
国防科学技术大学机电工程与自动化学院长沙 410073

详细信息

通讯作者:
罗兵, 国防科学技术大学机电工程与自动化学院副教授. 主要研究方向为微机械陀螺,嵌入式组合导航技术. E-mail: ruobing@nudt.edu.cn

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出版历程
- 收稿日期: 2011-04-27
- 修回日期: 2011-10-24
- 刊出日期: 2012-02-20

A Drive Control Scheme Based on Phase-control for Silicon Micromechanical Gyroscopes

1.
College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073

摘要

摘要: 全面分析、研究并实现了一种基于相位控制的硅微机械陀螺(Silicon micromechanical gyroscope, SMG)驱动控制技术. 分析了硅微陀螺驱动模态的动力学特性,阐述了相位控制方案的基本原理; 在此基础上建立了控制环路,采用自激振荡理论分析了其稳定性; 建立了环路的相位模型,引入特异因子实现相位控制误差到频率差 (工作频率与驱动模态谐振频率之差)的转换; 建立了对应于相位控制环路的频率模型,当环路滤波器为一阶模型时, 与传递函数为二阶的信号跟踪锁相环(Phase locked loop, PLL)不同,总的闭环模型仅为一阶; 最后基于FPGA平台,采用线性鉴相方式设计了数字化相位控制环路, 并结合幅值控制实现了双闭环驱动控制电路.测试结果表明, 该方案可实现硅微陀螺驱动端的高精度控制.
- 硅微陀螺 /
- 驱动控制 /
- 相位控制 /
- 锁相环
Abstract: A drive control scheme based on phase-control for silicon micromechanical gyroscopes (SMG) is studied and implemented. By analyzing the dynamical characteristics of the drive mode, the elementary principle of phase control scheme upon which the control loop is built is described and the stability of the loop is presented using the theory of self-sustained oscillation. The phase model of the loop is modeled where a special factor is introduced to realize the conversion from phase-error to frequency-error which is the difference between current working frequency and the resonance-frequency of the drive mode. By building the frequency closed-loop corresponding to the phase-control loop, we find that the order of the loop-filter is just one when considering loop-filter as a first-order-model, which is different from the general phase locked loop (PLL) that is second-order. Elaborate design of the digital phase-control circuit is carried out based on the FPGA platform where a linear phase-detector is applied. Aided by an amplitude control loop, a double-closed-loop drive control circuit is realized. Results show that the drive control loops work precisely.
- Silicon micromechanical gyroscope (SMG) /
- drive control /
- phase control /
- phase locked loop (PLL)

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参考文献(1)

[1]

Shkel A M, Horowitz R, Seshia A A, Sungsu P, Howe R T. Dynamics and control of micromachined gyroscopes. In: Proceedings of the American Control Conference. San Diego, USA: IEEE, 1999. 2119-2124[2] Niezrecki C, Cudney H H. Structural control using analog phase-locked loops. Journal of Vibration and Acoustics, 1997, 119(1): 104-109[3] Sun X, Horowitz R, Komvopoulos K. Stability and resolution analysis of a phase-locked loop natural frequency tracking system for MEMS fatigue testing. Journal of Dynamic Systems, Measurement, and Control, 2002, 124(4): 599-605[4] Wang C W, Yu H H, Wu M C, Fang W L. Implementation of phase-locked loop control for MEMS scanning mirror using DSP. Sensors and Actuators, A: Physical, 2007, 133(1): 243-249[5] Chang B S, Sung W T, Lee J G, Lee K Y, Sung S. Automatic mode matching control loop design and its application to the mode matched MEMS gyroscope. In: Proceedings of the IEEE International Conference on Vehicular Electronics and Safety. Beijing, China: IEEE, 2007. 1-6[6] Sung W T, Lee J Y, Lee J G, Kang T. Design and fabrication of an automatic mode controlled vibratory gyroscope. In: Proceedings of the 19th IEEE International Conference on Micro Electro Mechanical Systems. Istanbul, Turkey: IEEE, 2006. 674-677[7] Xia G M, Yang B, Wang S R. New digital drive phase control for improving bias stability of silicon MEMS gyroscope. Journal of Southeast University (English Edition), 2011, 27(1): 47-51[8] Xiao Ding-Bang, Hou Zhan-Qiang, Man Hai-Ou, Wu Xue-Zhong, Li Sheng-Yi. The closed-loop driving method of microgyroscope. Journal of National University of Defense Technology, 2009, 31(3): 116-121(肖定邦, 侯占强, 满海鸥, 吴学忠, 李圣怡. 微陀螺闭环驱动方法. 国防科技大学学报, 2009, 31(3): 116-121)[9] Zhou Wen-Wen, Zhang Rong, Zhou Bin, Chen Zhi-Yong. Drive loop design of single axis gyroscope based on SOPC. Journal of Chinese Inertial Technology, 2009, 17(1): 67-70(周文闻, 张嵘, 周斌, 陈志勇．基于SOPC的单轴陀螺驱动环路设计. 中国惯性技术学报, 2009, 17(1): 67-70)[10] Luo Bing, Wang An-Cheng, Wu Mei-Ping, Yu Hua-Peng. Digital double-closed-loop drive control scheme for silicon microgyroscope. Journal of Chinese Inertial Technology, 2010, 18(6): 747-750(罗兵, 王安成, 吴美平, 于化鹏. 硅微陀螺数字化双闭环驱动控制方法. 中国惯性技术学报, 2010, 18(6): 747-750)[11] Liu D C, Lu N N, Cui J, Lin L T, Ding H T, Yang Z C, Hao Y L, Yan G Z. Digital closed-loop control based on adaptive filter for drive mode of an MEMS gyroscope. In: Proceedings of the 9th IEEE Sensors Conference. Kona, USA: IEEE, 2010. 1722-1726

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基于相位控制的硅微机械陀螺驱动控制技术

doi: 10.3724/SP.J.1004.2012.00206

通讯作者:
罗兵, 国防科学技术大学机电工程与自动化学院副教授. 主要研究方向为微机械陀螺,嵌入式组合导航技术. E-mail: ruobing@nudt.edu.cn

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A Drive Control Scheme Based on Phase-control for Silicon Micromechanical Gyroscopes

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基于相位控制的硅微机械陀螺驱动控制技术

doi: 10.3724/SP.J.1004.2012.00206

通讯作者: 罗兵, 国防科学技术大学机电工程与自动化学院副教授. 主要研究方向为微机械陀螺,嵌入式组合导航技术. E-mail: ruobing@nudt.edu.cn

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A Drive Control Scheme Based on Phase-control for Silicon Micromechanical Gyroscopes

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出版历程

目录

通讯作者:
罗兵, 国防科学技术大学机电工程与自动化学院副教授. 主要研究方向为微机械陀螺,嵌入式组合导航技术. E-mail: ruobing@nudt.edu.cn