The Scheduling and Performance Analysis of Cluster Tools with Buffers Based on Branch Searching
-
摘要: 针对带缓冲与驻留约束的集束型设备调度问题,本文提出了一种基于分枝的搜索调度方法.首先,构造问题域的数学模型,在此基础上提出了一种全局搜索算法;然后,通过数学分析证明引出必要的引理,提出一个基于分枝搜索的算法;最后,进行了仿真实验和分析,结果表明本文提出的算法是有效且可行的,同时还表明了带缓冲模块的集束型设备在一定程度上能提高集束型设备的产能.Abstract: To solve the scheduling problem in a cluster tool with buffers and residency constraints, a search scheduling method based on branch is proposed. Firstly, a basic mathematical model is developed, and a general search algorithm is put forward using the mathematical model. And then several serviceable lemmas are proven through mathematical analysis. A search scheduling method based on branch searching is proposed using the serviceable lemmas. At last, simulation and analysis are conducted and the results also demonstrate the feasibility and effectiveness of the proposed approach. At the same time, the results indicate that the wafers in a cluster tool with buffers can improve the productivity to some extent.
-
Key words:
- Cluster tools /
- buffer module /
- residency constraints /
- scheduling /
- branch searching
-
图 6 生产率提高与搬运模块繁忙程度的关系
Fig. 6 The relationship of improvement rates with the busy degree of TM
图 7 生产率提高与加工时间之间的关系
Fig. 7 The relationship of improvement rates with processing time of PMs
表 1 $s=s_5$ 时相应参数的值
Table 1 The relevant parameter when $s=s_5$
$k$ 0 1 2 3 $\varphi(k)$ 0 2 1 3 $\varphi^-(k)$ 0 2 1 3 $u_k5$ $\setminus$ 0 1 0 ${{\lambda }_{k}}$ 1 1 1 1 
下载: 导出CSV
-
[1] Zhou B H, Wang Z, Chen J. Scheduling method for single-arm cluster tools of wafer fabrications with residency and continuous reentrancy. Journal of Southeast University, 2013, 29(2):187-193 https://www.researchgate.net/publication/289783362_Scheduling_method_for_single-arm_cluster_tools_of_wafer_fabrications_with_residency_and_continuous_reentrancy [2] Kim H J, Lee J H, Lee T E. Noncyclic scheduling of cluster tools with a branch and bound algorithm. IEEE Transactions on Automation Science and Engineering, 2015, 12(2):690-700 doi: 10.1109/TASE.2013.2293552 [3] Zhou B H, Gao Z S, Chen J. Scheduling algorithm of dual-armed cluster tools with residency time and reentrant constraints. Journal of Central South University, 2014, 21(1):160-166 doi: 10.1007/s11771-014-1927-2 [4] Geismar N, Dawande M, Sriskandarajah C. Productivity improvement from using machine buffers in dual-gripper cluster tools. IEEE Transactions on Automation Science and Engineering, 2011, 8(1):29-41 doi: 10.1109/TASE.2009.2039567 [5] 刘明祥, 周炳海. 基于时间约束集的集束型设备群调度方法. 自动化学报, 2012, 38(3):479-485 doi: 10.3724/SP.J.1004.2012.00479Liu Ming-Xiang, Zhou Bing-Hai. Scheduling algorithm of multi-cluster tools based on time constraint sets. Acta Automatica Sinica, 2012, 38(3):479-485 doi: 10.3724/SP.J.1004.2012.00479 [6] Yoon H J, Lee Y D. Online scheduling of integrated single-wafer processing tools with temporal constraints. IEEE Transactions on Semiconductor Manufacturing, 2005, 18(4):390-398 https://www.researchgate.net/publication/3284176_Online_Scheduling_of_Integrated_Single-Wafer_Processing_Tools_With_Temporal_Constraints [7] Perkinson T L, MacLarty P K, Gyurcsik R S, and Cavin R K. Single-wafer cluster tool performance:an analysis of throughput. IEEE Transactions on Semiconductor Manufacturing, 1994, 7(3):369-373 doi: 10.1109/66.311340 [8] Venkatesh S, Davenport R, Foxhoven P, Nulman J. A steady-state throughput analysis of cluster tools:dual-blade versus single-blade robots. IEEE Transactions on Semiconductor Manufacturing, 1997, 10(4):418-424 doi: 10.1109/66.641483 [9] Lim S Y, Park Y J, Lee H, Sun H. A real-time scheduling method for the cluster tool with wafer transfer delay. International Journal of Production Research, 2014, 52(4):934-946 doi: 10.1080/00207543.2013.808774 [10] Wu N Q, Chu C B, Chu F, Zhou M C. A petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints. IEEE Transactions on Semiconductor Manufacturing, 2008, 21(2):224-237 doi: 10.1109/TSM.2008.2000425 [11] Rostami S, Hamidzadeh B. Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints. IEEE Transactions on Semiconductor Manufacturing, 2002, 15(3):341-349 doi: 10.1109/TSM.2002.801379 [12] Zhou B H, Li X. Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints. Journal of Central South University, 2012, 19(1):187-192 doi: 10.1007/s11771-012-0990-9 [13] Rostami S, Hamidzadeh B. An optimal residency-aware scheduling technique for cluster tools with buffer module. IEEE Transactions on Semiconductor Manufacturing, 2004, 17(1):68-73 doi: 10.1109/TSM.2003.822725 [14] Ding S, Yi J, Zhang M T. Multicluster tools scheduling:an integrated event graph and network model approach. IEEE Transactions on Semiconductor Manufacturing, 2006, 19(3):339-351 doi: 10.1109/TSM.2006.879414 [15] Dawande M, Pinedo M, Sriskandarajah C. Multiple part-type production in robotic cells:equivalence of two real-world models. Manufacturing and Service Operations Management, 2009, 11(2):210-228 doi: 10.1287/msom.1070.0208 [16] Drobouchevitch I G, Geismar H N, Sriskandarajah C. Throughput optimization in robotic cells with input and output machine buffers:a comparative study of two key models. European Journal of Operational Research, 2010, 206(3):623-633 doi: 10.1016/j.ejor.2010.03.002 -
图(7) / 表(1)
计量
- 文章访问数: 2203
- HTML全文浏览量: 172
- PDF下载量: 749
- 被引次数: 0
