计算机拉制砷化镓单晶的数学模型及其最佳控制
The Mathematical Model and Optimum Control of Computer-Controlled Gallium Arsenide Single Crystal Growth
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摘要: 本文应用现代控制理论,建立了计算机控制的液封法直拉砷化镓单晶的数学模型,在这基础上设计了一个由电视机对直径的采样值以及加热功率构成的三阶闭环控制系统.Abstract: This paper discusses the establishment of the mathematical model of a computercontrolled liquid encapsulated Gallium Arsenide crystal growth. On this basis, a third-order close-loop control system of heating power by the television-measured diameter value is designed.
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