摘要:
网格技术是一种新型的分布计算技术,致力于解决复杂度很高的新应用问题.随着全球半导体生产规模的日益扩大,半导体生产线的优化调度问题成为学术界及工程界研究的热点.半导体生产线具有许多特殊的特点,诸如生产规模大、工件数量多、随机性大、加工成本高、高度的可重入性等,这些特点决定了原有的调度策略已不能满足半导体生产线的要求.鉴于网格技术在处理设备可扩展性和资源平衡性上的优势,主要研究将网格技术的思想用于半导体生产线的调度中.利用网格计算中的负载向量和失衡因子的概念,来控制半导体生产线上各加工机器处工件块的规模以及投料规模.通过优化算法的调度,使得半导体生产线的各加工设备负载得到平衡,设备的生产效率提高,缩短加工周期,从而达到优化生产线的目的.
Abstract:
The grid computing, a new type of distributed computing method, is applied to scheduling of semiconductor manufacturing line due to its advantages in production scale expanding and resource balance. Using the concept of load vector and load unbalance index in the grid, the product block scale and the release are adjusted for the semiconductor manufacturing line. With the optimal scheduling policy proposed in this paper, the machine balance can be kept, the production efficiency can be increased, the cycle time can be reduced and the system can be optimized to a large extent.