电子束成象的研究
A Study of Electron Beam Image Recording
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摘要: 本文简要介绍电子束曝光多灰级成象的方法及实验系统.在此系统上可获得三十二级以 上的图象灰度.在32mm×32mm的面积上可记录107位以上的图象信息,每位字长为8bit. 电子束束径可从数微米调至数百微米.系统可在黑白银卤片、酸敏变色片、自由基片上直接曝 光成象,且可兼容数字量及模拟量图象信息.Abstract: In this paper the system and method of electron beam image recording is presented. This system can give out more than 32 gray level image. About 10 M byte information are stored in an area of 32 min×32 mm. The diameter of the spot can be adjusted from a few micro-metre to hundreds micro-metre. Silver halid films, acid sensitive films and free radical sensitive materials can be used to record image. This system is compatible for both digital and analog information.
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