电子束数字录象析象技术及系统
Electron Beam Digital Image Recording and Analysis Technique and the EBR-83 System
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摘要: 本文简要介绍了电子束图象记录、图象解析的原理和方法,介绍了在此基础上建立的 EBR-83型电子束数字录象析象系统. 该系统的特点是可以输入输出高分辨率和高灰级图象,其最佳空间分辨率为二微米,灰级 高于128级,在有效成象面积内(30×30mm2)可存贮数十兆字节图象信息.Abstract: The principles and methods of the multi-gray level electron beam image recording and electron beam image analysis are presented. The EBR-83 system based on these principles and methods is introduced. The adventage of this system lies in that is can output and input image information. The spatial resolution is 2 μm, and the gray level is better than 128. The recording image area is 30×30mm2, in which tens million bytes of information can be stored.
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